Masque README

Masque is a Python module for designing lithography masks.

The general idea is to implement something resembling the GDSII file-format, but with some vectorized element types (eg. circles, not just polygons), better support for E-beam doses, and the ability to output to multiple formats.

• Source repository
• PyPI

Installation

Requirements:

• python >= 3.8
• numpy
• klamath (used for gdsii i/o and library management)
• matplotlib (optional, used for visualization functions and text)
• ezdxf (optional, used for dxf i/o)
• fatamorgana (optional, used for oasis i/o)
• svgwrite (optional, used for svg output)
• freetype (optional, used for text)

Install with pip:

pip3 install 'masque[visualization,oasis,dxf,svg,text]'

Alternatively, install from git

pip3 install git+https://mpxd.net/code/jan/masque.git@release

Translation

• Pattern: OASIS or GDS "Cell", DXF "Block"
• SubPattern: GDS "AREF/SREF", OASIS "Placement"
• Shape: OASIS or GDS "Geometry element", DXF "LWPolyline" or "Polyline"
• repetition: OASIS "repetition". GDS "AREF" is a SubPattern combined with a Grid repetition.
• Label: OASIS, GDS, DXF "Text".
• annotation: OASIS or GDS "property"

TODO

• Better interface for polygon operations (e.g. with pyclipper)
  • de-embedding
  • boolean ops
• Construct polygons from bitmap using skimage.find_contours
• Deal with shape repetitions for dxf, svg