Change comments to new format
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4 changed files with 215 additions and 157 deletions
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@ -20,9 +20,10 @@ def perturbed_l3(a: float, radius: float, **kwargs) -> Pattern:
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"""
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Generate a masque.Pattern object containing a perturbed L3 cavity.
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:param a: Lattice constant.
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:param radius: Hole radius, in units of a (lattice constant).
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:param kwargs: Keyword arguments:
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Args:
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a: Lattice constant.
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radius: Hole radius, in units of a (lattice constant).
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**kwargs: Keyword arguments:
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hole_dose, trench_dose, hole_layer, trench_layer: Shape properties for Pattern.
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Defaults *_dose=1, hole_layer=0, trench_layer=1.
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shifts_a, shifts_r: passed to pcgen.l3_shift; specifies lattice constant (1 -
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@ -30,11 +31,13 @@ def perturbed_l3(a: float, radius: float, **kwargs) -> Pattern:
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holes adjacent to the defect (same row). Defaults are 0.15 shift for
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first hole, 0.075 shift for third hole, and no radius change.
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xy_size: [x, y] number of mirror periods in each direction; total size is
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2 * n + 1 holes in each direction. Default [10, 10].
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`2 * n + 1` holes in each direction. Default `[10, 10]`.
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perturbed_radius: radius of holes perturbed to form an upwards-driected beam
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(multiplicative factor). Default 1.1.
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trench width: Width of the undercut trenches. Default 1.2e3.
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:return: masque.Pattern object containing the L3 design
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Return:
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`masque.Pattern` object containing the L3 design
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"""
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default_args = {'hole_dose': 1,
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